Abstract

A new, to the best of our knowledge, optical configuration for digital holographic profilometry for surface profile measurement of large-depth objects is proposed. Two multi-reflection mirrors were employed to extend the maximum axial measurable range by a factor of 2 without any degradation of the spatial resolution. By adjusting the distance and the position of the two multi-reflection reference mirrors, the system can be made more flexible for measuring different parts of the object. In addition to the axial extension, the two-mirror system also increases the visibility of the interference fringes so that the object profile can be measured with high accuracy.

© 2023 Optica Publishing Group

Noncontact vibration measurement using three spatial-frequency shifting coherent digital holography

Quang Duc Pham, Tuan Duc Pham, and Yoshio Hayasaki
Appl. Opt. 62(18) 4921-4927 (2023)

Multiplexed digital holography for fluid surface profilometry

Vitor S. Barroso, August Geelmuyden, Sreelekshmi C. Ajithkumar, Anthony J. Kent, and Silke Weinfurtner
Appl. Opt. 62(27) 7175-7184 (2023)

Wide field 3D optical profilometry using a diffraction Lloyd’s mirror interferometer

Monika Rani and Raj Kumar
Appl. Opt. 62(30) 8126-8135 (2023)

Area-coding method in frequency comb profilometry fused with optical interferometry for measuring centimeter-depth objects with nanometer accuracy

Quang Duc Pham and Yoshio Hayasaki
Appl. Opt. 59(12) 3608-3613 (2020)

Deep learning based coherence holography reconstruction of 3D objects

Quang Trieu and George Nehmetallah
Appl. Opt. 63(7) B1-B15 (2024)