Fabrication and characterization of a rapid-response, ultrasensitive dual-head interferometric pressure sensor

Rahim Ullah; Rahim Ullah; Raja Yasir Mehmood Khan; Muhammad Faisal

doi:10.1364/AO.501526

Applied Optics
Vol. 62,
Issue 33,
pp. 8924-8930
(2023)
•https://doi.org/10.1364/AO.501526

Fabrication and characterization of a rapid-response, ultrasensitive dual-head interferometric pressure sensor

Rahim Ullah, Raja Yasir Mehmood Khan, and Muhammad Faisal

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Rahim Ullah, Raja Yasir Mehmood Khan, and Muhammad Faisal, "Fabrication and characterization of a rapid-response, ultrasensitive dual-head interferometric pressure sensor," Appl. Opt. 62, 8924-8930 (2023)

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Table of Contents Category
- Optical Devices, Sensors, and Detectors
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About this Article
History
- Original Manuscript: July 24, 2023
- Revised Manuscript: October 27, 2023
- Manuscript Accepted: October 30, 2023
- Published: November 17, 2023

Abstract

A novel, to the best of our knowledge, dual-head Michelson interferometer-based pressure sensor with ultrahigh sensitivity and rapid response has been fabricated and optimized. The sensor consists of two diaphragm-based sensing heads, which operate on the principle of path-length variations of the interferometers due to the effect of pressure variation within the pressure channel. Pressure has been measured independently by the heads in terms of the fringe counts across two photodetectors with different sensitivities and working ranges. Head 1 had a linear working range of 0–6 psi and a sensitivity, resolution, and response time of 1295.04 fringe counts/psi, 25.74 µpsi, and 0.86 ms, respectively, which were 2.46, 2.46, and 0.86 times better than those of head 2. However, head 2 had a larger working range of 0–15 psi. Heads 1 and 2 yielded repeatable responses with negligible hysteresis and an average absolute error of 0.55% and 0.58%, respectively, compared to the predicted results. The proposed sensor has great potential for use in laboratory and industrial nonintrusive precise and fast-response pressure sensing applications.

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	Diaphragm Displacement		Fringe Counts
Parameter	Sensing Head 1	Sensing Head 2	Sensing Head 1	Sensing Head 2
$R^{2}$	0.9959	0.9999	0.9949	0.9999
Slope	0.36536	0.18001	1295.03571	526.81818
Intercept	0.04821	0.00151	145.46429	298.27273

Sr. No.	Sensor Type		Diaphragm Material	Working Range (psi)	Resolution (psi)	Rise Time	Reference
1.	Fiber Bragg grating reflector		Silicone	$2.9 \times 10^{- 6} - 0.97$	0.093	15 ms	[28]
2.	Fabry–Perot cavity		Thin ${S i O}_{2}$	0–145	0.043		[29]
3.	Fabry–Perot cavity		Graphene diaphragm at fiber tip	0–2.9		20 min	[30]
4.	Fiber Bragg grating reflector		Square shape 6061 aluminum alloy with a hinge-lever structure	0–29	0.91		[31]
5.	Fabry–Perot cavity		Cleaved optical fiber glass	0–116.03	0.03		[32]
6.	Capacitance diaphragm gauge (CDG)		Stainless steel membrane	0.003–0.58	$29 \times 10^{- 6}$		[33]
7.	Fabry–Perot cavity		Parylene-gold coated Polydimethylsiloxane (PDMS)	0–0.58	0.0044		[34]
8.	Free-space Michelson interferometer	Sensing head 1	Silicone: (thickness, 1 mm; effective diameter, 25 mm)	0–6	$25.74 \times 10^{- 6}$	0.86 ms	Present work
	Free-space Michelson interferometer	Sensing head 2	Silicone: (thickness, 2 mm; effective diameter, 25 mm)	0–15	$63.33 \times 10^{- 6}$	1.1 s

	Diaphragm Displacement		Fringe Counts
Parameter	Sensing Head 1	Sensing Head 2	Sensing Head 1	Sensing Head 2
$R^{2}$	0.9959	0.9999	0.9949	0.9999
Slope	0.36536	0.18001	1295.03571	526.81818
Intercept	0.04821	0.00151	145.46429	298.27273

Sr. No.	Sensor Type		Diaphragm Material	Working Range (psi)	Resolution (psi)	Rise Time	Reference
1.	Fiber Bragg grating reflector		Silicone	$2.9 \times 10^{- 6} - 0.97$	0.093	15 ms	[28]
2.	Fabry–Perot cavity		Thin ${S i O}_{2}$	0–145	0.043		[29]
3.	Fabry–Perot cavity		Graphene diaphragm at fiber tip	0–2.9		20 min	[30]
4.	Fiber Bragg grating reflector		Square shape 6061 aluminum alloy with a hinge-lever structure	0–29	0.91		[31]
5.	Fabry–Perot cavity		Cleaved optical fiber glass	0–116.03	0.03		[32]
6.	Capacitance diaphragm gauge (CDG)		Stainless steel membrane	0.003–0.58	$29 \times 10^{- 6}$		[33]
7.	Fabry–Perot cavity		Parylene-gold coated Polydimethylsiloxane (PDMS)	0–0.58	0.0044		[34]
8.	Free-space Michelson interferometer	Sensing head 1	Silicone: (thickness, 1 mm; effective diameter, 25 mm)	0–6	$25.74 \times 10^{- 6}$	0.86 ms	Present work
	Free-space Michelson interferometer	Sensing head 2	Silicone: (thickness, 2 mm; effective diameter, 25 mm)	0–15	$63.33 \times 10^{- 6}$	1.1 s

Rahim Ullah	https://orcid.org/0000-0002-6014-7763
Raja Yasir Mehmood Khan	https://orcid.org/0000-0003-3622-1924
Muhammad Faisal	https://orcid.org/0000-0003-2269-0746

Abstract

Data availability

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Tables (2)

Equations (3)

Applied Optics