Add to BibSonomy
Abstract
${\rm B}_4{\rm C}$-coated thin film mirrors are used in high brilliance synchrotron and x-ray free electron laser beamlines due to their low absorption coefficient and high thermal stability. As in the case of gold, platinum, and other thin film mirrors, ${{\rm B}_4}{\rm C}$-coated mirrors also are affected due to synchrotron radiation-induced carbon contaminations in beamlines. In the present study, a graphitic carbon (${\rm C}$) layer deposited on top of boron carbide (${{\rm B}_x}{\rm C}$) thin film surface is removed by five successive oxygen radio frequency (RF) plasma exposures (RF power, 10 W; ${{\rm O}_2}$ flow, 30 sccm; exposure time, 10 min each). Before and after the carbon layer removal, structural and compositional properties of the ${{\rm B}_x}{\rm C}/{\rm C}$ bilayer are characterized by soft x-ray reflectivity, x-ray photoelectron spectroscopy, grazing angle x-ray diffraction, and Raman spectroscopy techniques. Characterization results reveal that in the first four exposures the carbon layer thickness decreases continuously without affecting the ${{\rm B}_x}{\rm C}$ layer properties; however, in the fifth exposure, the carbon layer is completely removed along with a partial etching of the ${{\rm B}_x}{\rm C}$ layer too.
© 2023 Optica Publishing Group
Full Article | PDF ArticleMore Like This
P. K. Yadav, R. K. Gupta, A. K. Choubey, S. Ali, U. K. Goutam, and M. H. Modi
Appl. Opt. 60(1) 89-97 (2021)
S. Massahi, F. E. Christensen, D. D. M. Ferreira, S. Svendsen, P. L. Henriksen, L. M. Vu, N. C. Gellert, A. S. Jegers, B. Shortt, M. Bavdaz, I. Ferreira, M. Collon, B. Landgraf, D. Girou, A. Sokolov, and W. Schoenberger
Appl. Opt. 59(34) 10902-10911 (2020)
Regina Soufli, Andrew L. Aquila, Farhad Salmassi, Mónica Fernández-Perea, and Eric M. Gullikson
Appl. Opt. 47(25) 4633-4639 (2008)