Abstract

For a line-of-sight coating uniformity model, the source distribution is normalized such that all material can be traced. This is validated for a point source in an empty coating chamber. We can now quantify the source utilization of a coating geometry to determine what fraction of the evaporated source material is collected on the optics of interest. For the example of a planetary motion system, we calculate this utilization and two nonuniformity parameters for a large range of two input parameters, here the distance between the source and the rotary drive system and the lateral displacement of the source from the machine centerline. Contour plot visualizations in this 2D parameter space assist understanding geometry trade-offs.

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