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A New Method for Measuring Refractive Index with a Laser Frequency-shifted Feedback Confocal Microscope

Borui Zhou, Zihan Wang, and Xueju Shen

Open Access Open Access

Abstract

In this paper, a new method is presented to measure the refractive index of single plain glass or multilayered materials, based on a laser frequency-shifted confocal feedback microscope. Combining the laser frequency-shifted feedback technique and the confocal effect, the method can attain high axial-positioning accuracy, stability and sensitivity. Measurements of different samples are given, including N-BK7 glass, Silica plain glass, and a microfluidic chip with four layers. The results for N-BK7 glass and Silica plain glass show that the measurement uncertainty in the refractive index is better than 0.001. Meanwhile, the feasibility of this method for multilayered materials is tested. Compared to conventional methods, this system is more compact and has less difficulty in sample processing, and thus is promising for applications in the area of refractive-index measurement.

© 2020 Optical Society of Korea

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References

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  • Year
  • Author
  • Publication
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  10. T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
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    [Crossref]
  19. L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
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  21. K. Otsuka, "Effects of external perturbations on LiNdP4O12 lasers," IEEE J. Quantum. Electron. 15, 655‒663 (1979)
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  22. P. G. R. King, G. J. Steward, "Metrology with an optical maser," New Sci. 17, 14 (1963)
  23. S. Donati, G. Giuliani, S. Merlo, "Laser diode feedback interferometer for measurement of displacements without ambiguity," IEEE J. Quantum. Electron. 31, 113‒119 (1995)
    [Crossref]
  24. B. Ovryn, J. H. Andrews, "Phase-shifted laser feedback interferometry," Opt. Lett. 23, 1078‒1080 (1998)
    [Crossref]
  25. L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
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  27. J. Li, H. Niu, Y. X. Niu, "Laser feedback interferometry and applications: a review," Opt. Eng. 56, 050901 (2017)
    [Crossref]
  28. Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
    [Crossref]
  29. K. P. Birch, M. J. Downs, "Correction to the updated Edlén equation for the refractive index of air," Metrologia 31, 315‒316 (1994)
    [Crossref]

2019 (2)

J. W. Ye, M. Xia, K.-C. Yang, "An improved differential algorithm for the critical-angle refractometer," Optoelectron. Lett. 15, 108‒112 (2019)
[Crossref]

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

2018 (1)

2017 (2)

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

J. Li, H. Niu, Y. X. Niu, "Laser feedback interferometry and applications: a review," Opt. Eng. 56, 050901 (2017)
[Crossref]

2014 (1)

L. Xu, S. Zhang, Y. Tan, L. Sun, "Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry," Rev. Sci. Instrum. 85, 083111 (2014)
[Crossref]

2013 (3)

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
[Crossref]

2011 (1)

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

2010 (2)

2009 (1)

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
[Crossref]

2008 (1)

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

2007 (2)

2005 (1)

2004 (1)

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

2002 (2)

2000 (1)

S. Monneret, P. Huguet-Chantome, F. Flory, "m-Lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides," J. Opt. A: Pure Appl. Opt. 2, 188‒195 (2000)
[Crossref]

1998 (2)

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

B. Ovryn, J. H. Andrews, "Phase-shifted laser feedback interferometry," Opt. Lett. 23, 1078‒1080 (1998)
[Crossref]

1997 (1)

G. H. Meeten, "Refractive index errors in the critical-angle and the Brewster-angle methods applied to absorbing and heterogeneous materials," Meas. Sci. Technol. 8, 728‒733 (1997)
[Crossref]

1996 (1)

1995 (1)

S. Donati, G. Giuliani, S. Merlo, "Laser diode feedback interferometer for measurement of displacements without ambiguity," IEEE J. Quantum. Electron. 31, 113‒119 (1995)
[Crossref]

1994 (1)

K. P. Birch, M. J. Downs, "Correction to the updated Edlén equation for the refractive index of air," Metrologia 31, 315‒316 (1994)
[Crossref]

1979 (1)

K. Otsuka, "Effects of external perturbations on LiNdP4O12 lasers," IEEE J. Quantum. Electron. 15, 655‒663 (1979)
[Crossref]

1963 (1)

P. G. R. King, G. J. Steward, "Metrology with an optical maser," New Sci. 17, 14 (1963)

Abe, K.

Andrews, J. H.

Andrushchak, A. S.

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

Andrushchak, N. A.

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

Arwin, H.

Berginc, G.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Birch, K. P.

K. P. Birch, M. J. Downs, "Correction to the updated Edlén equation for the refractive index of air," Metrologia 31, 315‒316 (1994)
[Crossref]

Bobitskii, Y. V.

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

Boisrobert, C.

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

Booso, B.

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
[Crossref]

Brissonneau, V.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Brosch, T.

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

Brückner, J.-B.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Cardin, J.

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

Cha, M.

Choi, H. J.

Donati, S.

S. Donati, G. Giuliani, S. Merlo, "Laser diode feedback interferometer for measurement of displacements without ambiguity," IEEE J. Quantum. Electron. 31, 113‒119 (1995)
[Crossref]

Downs, M. J.

K. P. Birch, M. J. Downs, "Correction to the updated Edlén equation for the refractive index of air," Metrologia 31, 315‒316 (1994)
[Crossref]

Duan, L. C.

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

Eom, T. B.

Escoubas, L.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Fehri, M. F.

Feng, Z. C.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Ferguson, I. T.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Flory, F.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

S. Monneret, P. Huguet-Chantome, F. Flory, "m-Lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides," J. Opt. A: Pure Appl. Opt. 2, 188‒195 (2000)
[Crossref]

Gauvreau, B.

Gillen, G. D.

Giuliani, G.

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

S. Donati, G. Giuliani, S. Merlo, "Laser diode feedback interferometer for measurement of displacements without ambiguity," IEEE J. Quantum. Electron. 31, 113‒119 (1995)
[Crossref]

Guha, S.

Gundel, H.

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

Guo, S.

Gustafsson, G.

Hagel, O. J.

Hao, C. J.

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

Hassani, A.

He, G.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Herzinger, C. M.

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

Hofmann, T.

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
[Crossref]

Huguet-Chantome, P.

S. Monneret, P. Huguet-Chantome, F. Flory, "m-Lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides," J. Opt. A: Pure Appl. Opt. 2, 188‒195 (2000)
[Crossref]

Hüseyinoglu, E.

Ince, R.

Ji, L.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Johs, B.

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

Ju, J. J.

Kabashin, A.

Karbovnyk, I. D.

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

Kim, K. H.

Kim, S. H.

King, P. G. R.

P. G. R. King, G. J. Steward, "Metrology with an optical maser," New Sci. 17, 14 (1963)

Kityk, A. V.

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

Ko, J.-Y.

Leduc, D.

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

Lee, S. H.

Li, J.

J. Li, H. Niu, Y. X. Niu, "Laser feedback interferometry and applications: a review," Opt. Eng. 56, 050901 (2017)
[Crossref]

Li, Q.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Liang, Y.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Lim, H. H.

Lim, J. I.

Lim, T.-S.

Lin, T.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Liu, Y.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Lu, Y.

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

Luo, X.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Lupi, C.

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

McGahan, W. A.

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

Meeten, G. H.

G. H. Meeten, "Refractive index errors in the critical-angle and the Brewster-angle methods applied to absorbing and heterogeneous materials," Meas. Sci. Technol. 8, 728‒733 (1997)
[Crossref]

Merlo, S.

S. Donati, G. Giuliani, S. Merlo, "Laser diode feedback interferometer for measurement of displacements without ambiguity," IEEE J. Quantum. Electron. 31, 113‒119 (1995)
[Crossref]

Monneret, S.

S. Monneret, P. Huguet-Chantome, F. Flory, "m-Lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides," J. Opt. A: Pure Appl. Opt. 2, 188‒195 (2000)
[Crossref]

Moon, H. S.

Niu, H.

J. Li, H. Niu, Y. X. Niu, "Laser feedback interferometry and applications: a review," Opt. Eng. 56, 050901 (2017)
[Crossref]

Niu, Y. X.

J. Li, H. Niu, Y. X. Niu, "Laser feedback interferometry and applications: a review," Opt. Eng. 56, 050901 (2017)
[Crossref]

Otsuka, K.

Ovryn, B.

Paulson, W.

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

Plantier, G.

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

Plotnichenko, V. G.

Rouzo, J. L.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Sarangan, A.

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
[Crossref]

Scalise, L.

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

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D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
[Crossref]

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T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

Schubert, E.

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
[Crossref]

Schubert, M.

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
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S. Singh, "Refractive index measurement and its applications," Phys. Scr. 65, 167‒180 (2002)
[Crossref]

Skorobogatiy, M.

Sokolov, V. O.

Steward, G. J.

P. G. R. King, G. J. Steward, "Metrology with an optical maser," New Sci. 17, 14 (1963)

Sun, L.

L. Xu, S. Zhang, Y. Tan, L. Sun, "Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry," Rev. Sci. Instrum. 85, 083111 (2014)
[Crossref]

Sun, X.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Syrotynsky, O. I.

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

Tan, Y.

L. Xu, S. Zhang, Y. Tan, L. Sun, "Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry," Rev. Sci. Instrum. 85, 083111 (2014)
[Crossref]

Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
[Crossref]

Wan, L.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

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Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Wang, M. T.

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

Wang, W.

Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
[Crossref]

Wang, X.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Wood, T.

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Woollam, J. A.

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

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C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

Xia, M.

J. W. Ye, M. Xia, K.-C. Yang, "An improved differential algorithm for the critical-angle refractometer," Optoelectron. Lett. 15, 108‒112 (2019)
[Crossref]

Xu, C.

Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
[Crossref]

Xu, L.

L. Xu, S. Zhang, Y. Tan, L. Sun, "Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry," Rev. Sci. Instrum. 85, 083111 (2014)
[Crossref]

Yang, K.-C.

J. W. Ye, M. Xia, K.-C. Yang, "An improved differential algorithm for the critical-angle refractometer," Optoelectron. Lett. 15, 108‒112 (2019)
[Crossref]

Yang, Q.

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

Yao, J. Q.

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

Ye, J. W.

J. W. Ye, M. Xia, K.-C. Yang, "An improved differential algorithm for the critical-angle refractometer," Optoelectron. Lett. 15, 108‒112 (2019)
[Crossref]

Yi, Y.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Yu, Y.

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

Zhang, D.

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

Zhang, S.

L. Xu, S. Zhang, Y. Tan, L. Sun, "Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry," Rev. Sci. Instrum. 85, 083111 (2014)
[Crossref]

Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
[Crossref]

Appl. Opt. (5)

Appl. Phys. Lett. (1)

D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, M. Schubert, "Monoclinic optical constants birefringence and dichroism of slanted titanium nanocolumns determined by generalized ellipsometry," Appl. Phys. Lett. 94, 011914 (2009)
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K. Otsuka, "Effects of external perturbations on LiNdP4O12 lasers," IEEE J. Quantum. Electron. 15, 655‒663 (1979)
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IEEE Photonics J. (1)

C. J. Hao, Y. Lu, M. T. Wang, B. Q. Wu, L. C. Duan, J. Q. Yao, "Surface plasmon resonance refractive index sensor based on active photonic crystal fiber," IEEE Photonics J. 5, 4801108 (2013)
[Crossref]

IEEE Trans. Instrum. Meas. (1)

L. Scalise, Y. Yu, G. Giuliani, G. Plantier, T. Brosch, "Self-mixing laser diode velocimetry: application to vibration and velocity measurement," IEEE Trans. Instrum. Meas. 53, 223‒232 (2004)
[Crossref]

J. Appl. Phys. (2)

T. Schneider, D. Leduc, C. Lupi, J. Cardin, H. Gundel, C. Boisrobert, "A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements," J. Appl. Phys. 103, 063110 (2008)
[Crossref]

C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson, "Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample multi-wavelength multi-angle investigation," J. Appl. Phys. 83, 3323‒3336 (1998)
[Crossref]

J. Appl. Spectrosc. (1)

Y. Liang, F. Wang, X. Luo, Q. Li, T. Lin, I. T. Ferguson, Q. Yang, L. Wan, Z. C. Feng, "Investigation of the optical properties of InSb thin films grown on GaAs by temperature-dependent spectroscopic ellipsometry," J. Appl. Spectrosc. 86, 276‒282 (2019)
[Crossref]

J. Opt. A: Pure Appl. Opt. (1)

S. Monneret, P. Huguet-Chantome, F. Flory, "m-Lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides," J. Opt. A: Pure Appl. Opt. 2, 188‒195 (2000)
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G. H. Meeten, "Refractive index errors in the critical-angle and the Brewster-angle methods applied to absorbing and heterogeneous materials," Meas. Sci. Technol. 8, 728‒733 (1997)
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Metrologia (1)

K. P. Birch, M. J. Downs, "Correction to the updated Edlén equation for the refractive index of air," Metrologia 31, 315‒316 (1994)
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Microw. Opt. Technol. Lett. (1)

N. A. Andrushchak, O. I. Syrotynsky, I. D. Karbovnyk, Y. V. Bobitskii, A. S. Andrushchak, A. V. Kityk, "Interferometry technique for refractive index measurements at subcentimeter wavelengths," Microw. Opt. Technol. Lett. 53, 1193‒1196 (2011)
[Crossref]

New Sci. (1)

P. G. R. King, G. J. Steward, "Metrology with an optical maser," New Sci. 17, 14 (1963)

Opt. Commun. (1)

T. Wood, V. Brissonneau, J.-B. Brückner, G. Berginc, F. Flory, J. L. Rouzo, L. Escoubas, "Optical measurement of exposure depth and refractive index in positive photoresists," Opt. Commun. 291, 184‒192 (2013)
[Crossref]

Opt. Eng. (1)

J. Li, H. Niu, Y. X. Niu, "Laser feedback interferometry and applications: a review," Opt. Eng. 56, 050901 (2017)
[Crossref]

Opt. Express (2)

Opt. Lett. (2)

Optoelectron. Lett. (1)

J. W. Ye, M. Xia, K.-C. Yang, "An improved differential algorithm for the critical-angle refractometer," Optoelectron. Lett. 15, 108‒112 (2019)
[Crossref]

Phys. Scr. (1)

S. Singh, "Refractive index measurement and its applications," Phys. Scr. 65, 167‒180 (2002)
[Crossref]

Rev. Sci. Instrum. (1)

L. Xu, S. Zhang, Y. Tan, L. Sun, "Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry," Rev. Sci. Instrum. 85, 083111 (2014)
[Crossref]

Sci. Rep. (1)

Y. Tan, W. Wang, C. Xu, S. Zhang, "Laser confocal feedback tomography and nano-step height measurement," Sci. Rep. 3, 2971 (2013)
[Crossref]

Sens. Actuator B (1)

L. Ji, X. Sun, G. He, Y. Liu, X. Wang, Y. Yi, D. Zhang, "Surface plasmon resonance refractive index sensor based on ultraviolet bleached polymer waveguide," Sens. Actuator B 244, 373‒379 (2017)
[Crossref]

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