Abstract

A high-speed plasmonic barium titanate (BTO, BaTiO₃) Mach-Zehnder modulator is presented. We combine nanoscale plasmonics with BTO as solid-state active material and silicon nitride (SiN) for versatile and low loss waveguiding, and integrate them in a monolithic platform. We demonstrate a plasmonic BTO modulator processed onto foundry-produced SiN. The 15 μm long high-speed modulator features a flat electro-optic frequency response up to 70 GHz and is expected to be flat way beyond. A low V_πL product of 144 Vμm is shown. Data experiments reaching 216 Gbit/s with a 216 GBd 2PAM signal and 256 Gbit/s with a 128 GBd 4PAM signal are demonstrated. The merger of the versatile silicon nitride platform with high-speed plasmonics using the highly nonlinear ferroelectric BTO is an attractive solution as a future Tb/s optical interconnect platform.

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