Abstract
Single mode silicon-on-insulator rib waveguides offer a weak lateral
confinement, which makes it difficult to design high-performance multimode
interference couplers (MMIs) based on these waveguides. Here, a complete design
procedure for single etch step MMIs with tapered rib access waveguides is
presented, which yields low excess loss (0.1 dB) and good imbalance (0.02
dB). Furthermore, polarization dependence is low, and high fabrication tolerances
are achieved, especially with respect to etch depth.
© 2008 IEEE
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