Abstract
Two different mirror pairs of 45°-assembled swing-type micro-electro-mechanical systems mirrors for
optical interconnects are proposed. Magnetic beads are attached to the back of the mirror plate to enable magnetic
actuation. The device is fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. The magnetically-actuated
micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and
system reconfiguration. Two designs of torsion springs are employed. The full swing angles are 16.9° and 9.8°
for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively.
© 2013 IEEE
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