Abstract
On-chip waveguide-integrated suspended microcavity resonator as a good sensing element is constantly pursued combining with the advantages of an optical material to enhance device performance. In this work, low-loss waveguide-integrated suspended Ge11.5As24Se64.5 microdisk resonators have been successfully demonstrated using an optimized etching recipe. The realization of propagation loss down to 0.48 dB/cm verifies the low-loss characteristic of chalcogenide glass rectangular waveguide. An optical loaded quality factor of 1.1 × 106 for the no suspended microdisk resonator, approaching to the highest figure (1.2 × 106) so far reported in planar chalcogenide optical devices, is obtained experimentally to reveal the natural evolution of high quality chalcogenide glass membrane during the engineering of shallow suspension configuration. By comparing with the scattering loss of mode in no suspended case, the contributions of bottom roughness scattering to the optical losses increase exceeding 50% in the shallowly suspended counterparts. The optimization and optical losses analysis of the waveguide-integrated suspended chalcogenide microdisk resonators are helpful to further estimate its potentials in the emerging stress or strain sensors.
PDF Article
More Like This
High quality, high index-contrast chalcogenide microdisk resonators
Rizhen Zhang, Zhen Yang, Mingyue Zhao, Peipeng Xu, Wei Zhang, Zhe Kang, Jiajiu Zheng, Shixun Dai, Rongping Wang, and Arka Majumdar
Opt. Express 29(12) 17775-17783 (2021)
Low-loss photonic device in Ge–Sb–S chalcogenide glass
Qingyang Du, Yizhong Huang, Junying Li, Derek Kita, Jérôme Michon, Hongtao Lin, Lan Li, Spencer Novak, Kathleen Richardson, Wei Zhang, and Juejun Hu
Opt. Lett. 41(13) 3090-3093 (2016)
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription