Abstract
Blazed gratings are widely used in optical detection devices with the unique property of concentration of light energy to a desired diffraction order. However, traditional substrates for fabricating blazed gratings are easily damaged with the wear and tear in long-term usage under harsh conditions. Here, we propose the fabrication of blazed gratings on sapphire with high mechanical stability by femtosecond laser lithography combined with subsequent reactive ion etching (RIE). Various sapphire blazed gratings with periods from 2 μm to 10 μm and heights from 260 nm to 2 μm were realized to concentrate light energy (wavelengths of 405 nm, 532 nm and 633 nm) to different diffraction orders (1st, 2nd, and 3rd). The results provide great insights for the construction of micro-optical devices that have potential applications under harsh conditions.
PDF Article
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription