Abstract

In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic crystal reflector, and it senses the external acceleration through a “three-beam” structure which is composed of a central support beam and two tiny beams. The push-pull structure eliminates the coupling crosstalk caused by paraxial acceleration. Accurate results are demonstrated as follows: an accelerometer mechanical sensitivity of 3.638 nm/g, with a resonance frequency of 1742.2 Hz and a linear measurement range of ± 500 g, corresponding to a foot print of the core part with 960 μm×600 μm. With its high precision, large measurement range, and small size, the proposed accelerometer may pave the way for the applications in civil, industrial and military fields.

Micro-opto-electro-mechanical systems accelerometer based on the Talbot effect of double-layer diffraction gratings

Liming Jin, Ce Wang, Li Jin, Wenqing Chen, Haodong Xu, Min Cui, and Mengwei Li
Appl. Opt. 61(18) 5386-5391 (2022)

Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal

Arash Sheikhaleh, Kambiz Abedi, Kian Jafari, and Reza Gholamzadeh
Appl. Opt. 55(32) 8993-8999 (2016)

Linearization signal conditioning circuit for tri-axial micro-grating MOEMS accelerometer

Li Jin, Kunyang Xie, Yixin Du, and Mengwei Li
Opt. Express 32(6) 10241-10251 (2024)

Optical accelerometer based on high-order diffraction beam interference

Liuhua Chen, Qiao Lin, Shu Li, and X. Wu
Appl. Opt. 49(14) 2658-2664 (2010)

Noise suppression of a micro-grating accelerometer based on the dual modulation method

Tianhang Zhang, Huilan Liu, Lishuang Feng, Xiao Wang, and Yu Zhang
Appl. Opt. 56(36) 10003-10008 (2017)