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An Interferometric Method for Accurate Thickness Measurements of Thin Evaporated Films

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Abstract

A method is described in which a Fabry-Perot interferometer is used to measure the thickness of uniform thin films to an accuracy of ±15A. The separation of the D-lines of sodium light is used as a standard of length. The method is evaluated by comparison with other methods and in terms of its applications and limitations.

© 1950 Optical Society of America

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