Abstract

This paper analyzes the features of the optical adjustment of an ellipsometer with an optically active compensator. Recommendations are given on the choice of the positive direction of rotation of the optical elements, the importance of which is determined by the existence of the nonzero off-diagonal elements of the Jones matrix of the compensator (parameters p1and p2). The problem associated with the existence of the optimum version of the optical adjustment of a compensator with nonzero parameters p1 and p2 is studied. It is shown for the first time that bringing adjustment parameter K0 into coincidence with the dial reading K1 that determines the position of the minimum of the fast axis close to the plane of incidence causes a mathematical connection to be established between the compensator parameters p, p1 , and p2 , and this substantially alters and simplifies the situation.

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