Abstract
Questions of the profilometric analysis of the piecewise-continuous microrelief of
high-efficiency diffraction elements have been virtually ignored in the literature,
even though the market for diffraction optics has substantially increased in recent
years, and high-efficiency diffraction elements have gone from the realm of the
exotic to ordinary practice of optical instrumentation. In this paper, the authors
consider several techniques for evaluating microrelief that make it possible to
compute the “approximated depth,” almost regardless of the
type of profilometer being used. The proposed techniques are based on a polynomial
approximation of the diffraction-zone profile with minimization of the influence of
the unreliable data close to its boundaries.
© 2009 Optical Society of America
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