Abstract

The problems related to the cleaning procedure (surface preparation) of optical components at production facilities are discussed. Many of the considered methods are outdated and do not comply with the requirements of technological procedures performed in cleanrooms. We establish that hydromechanical cleaning makes it possible to obtain surfaces of optical components with hydrophilic properties, and this method can be applied in cleanrooms for manufacturing components with the 0th surface finish class of polished surfaces.

© 2021 Optical Society of America

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