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12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators

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Abstract

We show a scheme for achieving high-speed operation for carrier-injection based silicon electro-optical modulator, which is optimized for small size and high modulation depth. The performance of the device is analyzed theoretically and a 12.5-Gbit/s modulation with high extinction ratio >9dB is demonstrated experimentally using a silicon micro-ring modulator.

©2007 Optical Society of America

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Figures (6)

Fig. 1.
Fig. 1. Normalized transmission spectra of the modulator. Black line: transmission spectrum with 0V applied on the p-i-n junction. Blue line: transmission spectrum with 1.8V on the junction. The dc current at this voltage is 58μA. Inset: schematic of the device structure.
Fig. 2.
Fig. 2. Calculated dynamics of the micro-ring modulator. (a): NRZ driving signal at 5 Gbit/s; V 1 = V 2 = 4V. (b): Total charge in the junction with driving voltage of (a). (c): Optical transmission of the ring resonator; tr = 192 ps; ts = t 1- t 2 = 114 ps. (d): Pre-emphasized NRZ signal at 5Gbit/s; V 1 = 6V; V'1 = 2V; V 2 = 4V. (e): Total charge in the junction with driving voltage of (d). (f): Optical transmission of the ring resonator; tr = 110 ps; ts = t 1 - t 2 ≈ 0 ps. In all the calculations, we used the experimentally measured serial resistance R = 7.7 kΩ
Fig. 3.
Fig. 3. Schematics of the experimental setup showing the generation of the NRZ driving signal with pre-emphasis. PG: pattern generator. IGN: impulse generator network. PC: power combiner. DUT: device under test.
Fig. 4.
Fig. 4. (a). square-wave driving signals with (red line) and without (blue and green lines) the pre-emphasis. (b): the output optical power when the modulator is driven by voltage signals shown in (a).
Fig. 5.
Fig. 5. The waveform and eye-diagram of the electrical driving signal with pre-emphasis at 12.5 Gbit/s.
Fig. 6.
Fig. 6. Eye-diagrams of the modulated optical output at 12.5 Gbit/s with PRBS 210-1.

Equations (6)

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T = 1 1 1 + ( Q Q 0 ) 2
Q 0 = qn g V Γ n f 2 2.2 × 10 14 C
dQ ( t ) dt = i ( t ) Q ( t ) τ c = v ( t ) v j ( t ) R Q ( t ) τ c
dQ ( t ) dt = V 1 v th R Q ( t ) τ c
dQ ( t ) dt = V 2 v th R Q ( t ) τ c Q > 0
dQ ( t ) dt = V 2 Q ( t ) C j R Q ( t ) τ c Q 0
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