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Industrial applications of laser micromachining

Malcolm C. Gower

Open Access Open Access

Abstract

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.

©2000 Optical Society of America

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Figures (16)
Fig. 1.
Fig. 1. 100mm holes drilled in 75mm high-density polyethylene with (a) a twist drill bit (b) a KrF laser

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Fig.2.
Fig.2. 100µm diameter blind microvia drilled in a PCB. (a) Step 1. Nd laser trepanned hole in top copper conductive layer. (b) Step 2. CO2 laser drilling of fiber reinforced composite FR4 layer to copper below.

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Fig. 3.
Fig. 3. Nd:YAG & CO2 hybrid laser tool for microvia drilling.

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Fig. 4.
Fig. 4. (a) Array of 30µm diameter ink jet printer nozzles drilled in polyimide. (b) Array of nonlinear tapered nozzles aiding laminar fluid flow

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Fig. 5.
Fig. 5. (a) Tapered nozzle with rifling. (b) Nozzle array with machined reservoirs

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Fig. 6.
Fig. 6. (a). Hole in the side of a bilumen catheter (b) Automated reel-to-reel excimer laser workstation for simultaneous hole drilling in optical fibers.

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Figure 7.
Figure 7. (a) Rectangular 50×20µm holes drilled in 100µm fibers for PaO2 & PaCO2-sensors. (b) Laser stripped insulation from 100µm diameter pH-sensor wire

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Figure 8.
Figure 8. Laser scribing of thin films on solar panels and completed TFS panel

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Figure 9.
Figure 9. (a) 25mm wide tracks in ITO layer. (b) Nd pulsed laser panel scribing machine

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Figure 10.
Figure 10. KrF laser produced surfaces in polycarbonate produced using mask-dragging techniques.

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Figure 11.
Figure 11. Micro-optical surfaces fabricated by KrF laser micromachining and orthogonal mask-dragging

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Figure 12.
Figure 12. Biochip manufactured using laser micromachining.

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Figure 13.
Figure 13. KrF laser micromachined microfluidic channels in polyester

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Figure 14.
Figure 14. KrF laser micromachined fiber holders in polyester

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Figure 15.
Figure 15. KrF laser-machined 3D-structures in polycarbonate.

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Figure 16.
Figure 16. MEMS devices fabricated by excimer laser micromachining

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