Abstract
An optical configuration for measurement of in-plane displacement and for
contouring is reported. In this method an object point is viewed symmetrically
with respect to surface normal and combined coherently at the image plane of the
imaging system. Because the beams are combined by small apertures at the image
plane, decorrelation sets in rather slowly. Owing to low decorrelation, fringes
have been obtained for large in-plane deformations and large angular tilts. The
method is simple to implement, and its sensitivity can be varied over a wide
range. The configuration, therefore, extends the range of measurement.
© 1996 Optical Society of America
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