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Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation

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Abstract

Efficient generation of extreme UV (EUV) light at λ=13.5nm from a bulk Sn target has been demonstrated by using a fiber laser. The conversion efficiency from the 1064nm IR to the EUV was measured to be around 0.9% into 2π steradians within a 2% bandwidth. To the best of our knowledge, this is the first time an all-fiber system was used to generate EUV or soft x rays.

© 2006 Optical Society of America

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