Abstract
thin films were grown on a-plane sapphire substrates by plasma-assisted molecular beam epitaxy. Compared with ZnO, the crystal quality of thin films degrades significantly, which results in low internal quantum efficiency (). Besides improving the quality of , an effective method has been used to enhance the internal quantum efficiency and the UV emission of by sputtering Al nanoparticles. Taking advantage of the resonant coupling between UV emission of film and Al nanoparticle surface plasmons (SPs), a 59-fold enhancement of the UV emission and a 3.5-fold enhancement of has been achieved under the optimized sputtering time. Moreover, the enhancement ratio is stable after two months. It paves a facile way in fabricating high-efficiency UV optoelectronic devices.
© 2017 Optical Society of America
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