Abstract

We demonstrate ultrasound detection with 500-μm-diameter photonic-crystal slab (PCS) sensors fabricated from CMOS-compatible technology. An ultrasound signal impinging a PCS sensor causes a local modulation of the refractive index (RI) of the medium (water) in which the PCS is immersed, resulting in a periodic spectral shift of the optical resonance of the PCS. The acoustic sensitivity is found to scale with the index sensitivity $S$ and quality factor $Q$. A noise equivalent pressure (NEP) of 650 Pa with averaging ($7.4\mathrm{Pa}/\sqrt{\mathrm{Hz}}$) and relative wavelength shifts of up to $4.3\times {10}^{-5}{\mathrm{MPa}}^{-1}$ are measured. The frequency response of the sensors is observed to be flat from 1 to 20 MHz, with the range limited only by our measurement apparatus.

© 2019 Optical Society of America

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