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All-polymeric high-Q optofluidic Fabry–Perot resonator

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Abstract

A full polymeric optofluidic Fabry–Perot (FP) resonator with a high quality factor (Q) is proposed and tested. The device is based on multilayer optical polymeric films that act as high reflectivity interference mirrors. The all-polymeric laminated structure avoids any deposition or etching process, simplifying the fabrication procedure while retaining a high quality optical surface. The measured quality factor of the FP resonator is ${3.03} \times {{10}^4}$, and the finesse is 91 around 700 nm. The refractometric sensing properties have been measured, and a sensitivity of 314 nm/RIU with a limit of detection of ${2.55} \times {{10}^{- 5}}\;{\rm RIU}$ could be achieved. The device exhibits a very high figure of merit of ${1.36} \times {{10}^4}\;{{\rm RIU}^{- 1}}$ that is comparable with the performance attainable with sensors based on photonic crystal and whispering gallery mode resonators.

© 2021 Optical Society of America

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