Abstract
Since the first observation of the e-beam excited XeF(B→X:351- and 353-nm) laser in 1975 as a near UV source, it has been investigated for higher efficiency of operation in terms of buffer gas,1 fluorine donor,2 and initial gas temperature.3 Many experiments were carried out using Ne buffered high pressure (~3 atm) gas mixtures. However, from the viewpoint of energy scaling, a low pressure operation is attractive if it can be made to work efficiently at low pressures.
© 1989 Optical Society of America
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