Abstract
Etching of GaN materials has attracted great attention because of the need in fabricating blue-green light-emitting diodes, laser diodes and possibly other optoelectronic devices.
© 1997 Optical Society of America
PDF ArticleEtching of GaN materials has attracted great attention because of the need in fabricating blue-green light-emitting diodes, laser diodes and possibly other optoelectronic devices.
© 1997 Optical Society of America
PDF Article