Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper CTuK7

Deep UV laser-assisted cryo-etching of GaN

Not Accessible

Your library or personal account may give you access

Abstract

Etching of GaN materials has attracted great attention because of the need in fabricating blue-green light-emitting diodes, laser diodes and possibly other optoelectronic devices.

© 1997 Optical Society of America

PDF Article
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.