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A New Method for Measuring AlGaOx Oxidation Width of Circular Defect in 2D Photonic Crystal (CirD) Laser

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Abstract

To develop the CirD laser, which will be used in intra-chip optical interconnects, we investigate a new method to measure the oxidation width of AlGaOx precisely so that we can obtain the most appropriate Q factor.

© 2022 IEEE

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