Abstract
We report on the development of low-loss photonic components fabricated in low-temperature PECVD SiN for the development of a CMOS compatible biophotonics platform. We discuss modeling and experimental demonstration of strip waveguides, MMI and evanescent couplers, fractal trees for power distribution and AWGs and waveguide-integrated resonators as wavelength selective components.
© 2014 Optical Society of America
PDF ArticleMore Like This
Yuriko Maegami, Makoto Okano, Guangwei Cong, Keijiro Suzuki, Morifumi Ohno, Toshihiro Narushima, Nobuyuki Yokoyama, Miyoshi Seki, Shigeru Saitou, Minoru Ohtsuka, Hitoshi Kawashima, and Koji Yamada
ITu3A.3 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2021
Amir H. Hosseinnia, Hesam Maoradinejad, Majid Sodagar, Ali A. Eftekhar, and Ali Adibi
SM4G.1 CLEO: Science and Innovations (CLEO:S&I) 2016
Min Teng, Hao Wu, Chenlei Li, Feng Wang, Yinchao Du, and Xuezhe Zheng
Th2A.5 Optical Fiber Communication Conference (OFC) 2022