Abstract
In research of proposed superhard β-C3N4 layers [1] with pulsed laser deposition (PLD) technique a problem arise how to reach high nitrogen content in layers Using PLD only, N/C ratio usually does not excess value of 0 5-0 7 [2] In our new deposition arrangement (Fig 1), in which PLD is combined with additional radtofrequency (RF, 13 56 MHz, up to 300 W) and hollow cathode (HC) discharges for nitrogen excitation, the N/C round I was reached
© 2000 IEEE
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