Abstract
The passivation of semiconductor surfaces by adsorbates is prospective to construct nanoscale structures such as quantum wires and dopings. Since the adsorption and dissociation of gas molecules supplied on a surface depend on the local chemical reactivity on the surface, selective adsorption or growth is realized on the nanometer scale by removing the adsorbates for the passivation with atomic accuracy.
© 1997 Optical Society of America
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