Abstract
Aberrations smaller than the classical diffraction limit of Rayleigh or Marechal are shown to cause significant losses in depth of focus and critical dimension control.
© 1994 Optical Society of America
PDF ArticleMore Like This
Dave Stephenson
MID.202 International Optical Design Conference (IODC) 1994
K. A. Goldberg, R. Beguiristain, J. Bokor, H. Medecki, K. Jackson, D. T. Attwood, G. E. Sommargren, J. P. Spallas, and R. Hostetler
TEO.134 Extreme Ultraviolet Lithography (EUL) 1994
S. T. Srinivasan, A. H. Paxton, S. Z. Sun, S. D. Hersee, G. C. Dente, and M. L. Tilton
CMA4 Conference on Lasers and Electro-Optics (CLEO:S&I) 1994