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Conferences > EUVXRAY > 2024 > EW3A > EW3A.4

High-speed, high-resolution, and material-specific coherent EUV imaging using a high-order harmonic source

Wilhelm Eschen, Chang Liu, Daniel S. Penagos M., Robert Klas, Jens Limpert, and Jan Rothhardt

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Abstract

We present a tabletop coherent imaging system at 13.5 nm driven by an ultrafast 75 W fiber laser, achieving a record imaging-speed of 5 Mpix/h, enabling detailed chemical composition mapping for samples from microbiology and the semiconductor industry.

© 2024 The Author(s)

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