Abstract
We have adapted an atom probe tomograph (APT) with an extreme ultraviolet (EUV) source. The observations suggest that the photoionization pathway provided by the EUV light is superior to the thermal mechanism in conventional APT.
© 2018 The Author(s)
PDF ArticleMore Like This
Luis Miaja-Avila, Ann N. Chiaramonti, Paul T. Blanchard, Norman A. Sanford, David R. Diercks, and Brian P. Gorman
SF2G.6 CLEO: Science and Innovations (CLEO:S&I) 2019
Taylor J. Buckway, Aaron Redd, Jacob M. Feltman, Patrick J. Skrodzki, Prashant Padmanabhan, Pamela R. Bowlan, and Richard L. Sandberg
JTu4A.77 Frontiers in Optics (FiO) 2022
O. O. Versolato, D. Kurilovich, F. Torretti, R. Schupp, J. Scheers, M. J. Deuzeman, A. Bayerle, R. Hoekstra, and W. Ubachs
ET3B.4 Compact EUV & X-ray Light Sources (EUVXRAY) 2018