Abstract
The Ti diffusion method is well known for making low-loss waveguides. However, the coupling and bending loss must be reduced for small-scale integration. These losses are mainly attributed to the asymmetric spot of waveguide.1 A symmetric waveguide spot is appropriate for reducing both the coupling and the bending loss. To achieve this, several proposals such as MgO/Ti double diffusion have been made.2 However, there is a trade off between reduction of loss and other switching performances.2
© 1990 Optical Society of America
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