Abstract
Recent development of high-pressure electric discharge technology1,2 for the F2 laser has produced a 10-fold increase in output energy to >100 mJ. Such energy at a vacuum ultraviolet wavelength of 157 nm is desirable for photolithographic and photochemical applications. This paper summarizes the further optimization of this technology and the performance of a low inductance discharge laser that produces 12 ns pulses, a peak power of 8.3 MW and an extraction energy density of 4.1 J/L.
© 1992 Optical Society of America
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