Accurate calibration of 3-D scanning stages by four-beam laser interferometry

Osamu Nakamura; Mitsuo Goto

doi:10.1364/OAM.1993.ThDD.25

OSA Annual Meeting
Technical Digest Series (Optica Publishing Group, 1993),
paper ThDD.25
•https://doi.org/10.1364/OAM.1993.ThDD.25

Accurate calibration of 3-D scanning stages by four-beam laser interferometry

Osamu Nakamura and Mitsuo Goto

OSA Annual Meeting 1993

Toronto Canada
3–8 October 1993
ISBN:

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OSA Poster Session: 2 (ThDD)

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O. Nakamura and M. Goto, "Accurate calibration of 3-D scanning stages by four-beam laser interferometry," in OSA Annual Meeting, Technical Digest Series (Optica Publishing Group, 1993), paper ThDD.25.

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Abstract

Mechanisms for any kind of scanning probe microscop, are required to ensure accurate and precise scanning in three-dimensional (3D) microscopic space.

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