Rapid micro- and nanostructuring by UV-LED-based microscope projection lithography

Lei Zheng; Lei Zheng; Carsten Reinhardt; Bernhard Roth; Bernhard Roth

Optica Design and Fabrication Congress 2023 (IODC, OFT)
Technical Digest Series (Optica Publishing Group, 2023),
paper OW1B.4

Rapid micro- and nanostructuring by UV-LED-based microscope projection lithography

Lei Zheng, Carsten Reinhardt, and Bernhard Roth

Optical Fabrication and Testing 2023

Québec City, Québec Canada
4–8 June 2023
ISBN: 978-1-957171-22-7

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Advanced Micro-Optics Fabrication III (OW1B)

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L. Zheng, C. Reinhardt, and B. Roth, "Rapid micro- and nanostructuring by UV-LED-based microscope projection lithography," in Optica Design and Fabrication Congress 2023 (IODC, OFT), Technical Digest Series (Optica Publishing Group, 2023), paper OW1B.4.

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Abstract

A low-cost and simple UV-LED-based projection lithography approach enabling micro- and nanostructuring in seconds and with subwavelength resolution is demonstrated in this work.

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