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Conferences > OFT > 2023 > OW1B > OW1B.6
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper OW1B.6

High-precision finishing method for narrow-gap channel-cut crystal X-ray monochromators using atmospheric-pressure plasma with a wire electrode

Shotato Matsumuta, Iori Ogasahara, Taito Osaka, Kazuto Yamauchi, Makina Yabashi, and Yasuhisa Sano

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Abstract

We develop a high-precision surface finishing method for narrow-gap channel-cut crystal X-ray monochromators. We present details of the plasma etching method and its impact on monochromatized X-ray properties.

© 2023 The Author(s)

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