Abstract

We will report on the composition, optical and mechanical properties of ion beam sputter deposited films of magnesium fluoride. Sputtered films were found to be more fluorine deficient and absorptive than thermally deposited films. Both of these film properties increased with increasing atomic weight of the sputter ion. Depositing films in the presence of a fluorine-containing gas (CF₄) reinstated the fluorine and decreased the oxygen content of the film. Film composition and density were determined using Rutherford backscattering spectroscopy. The refractive index, stress, and microstructure of the films will also be discussed.

© 1988 Optical Society of America