Abstract

It has been known for a long time that vapor sources in high vacuum behave following closely the Knudsen's laws^[1] if the hypothesis of his theory are well fulfilled. The characteristics of many sources used on PVD methods like thermal evaporation, electron beam gun, sputtering, etc. commonly depart from a Knudsen's theory^[2-3], however a proper modification of the hypothesis of this model can explain and model the experimental emission pattern of this vapor sources.

© 1998 Optical Society of America