Abstract
In order to better understand the fabrication of optical surfaces and be able to produce smoother, lower scatter surfaces, surface characterization needs to be extended into shorter and longer surface spatial wavelength regions. Scanning probe microscopes are now available to profile optical surfaces. Long scan profilers are also available to give profile information for distances longer than a few millimeters with sensitivities and accuracies of atomic dimensions.
© 1992 Optical Society of America
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