Soft-X-ray Projection Lithography Experiments using Schwarzschild Imaging Optics

D. A. Tichenor; G. D. Kubiak; M. E. Malinowski; R. H. Stulen; S. J. Haney; K. W. Berger; L. A. Brown; W. C. Sweatt; J. E. Bjorkholm; R. R. Freeman; M. D. Himel; A. A. MacDowell; D. M. Tennant; O. R. Wood; J. Bokor; T. E. Jewell; W. M. Mansfield; W. K. Waskiewicz; D. L. White; D. L. Windt

doi:10.1364/SXRAY.1992.WA1

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1992),
paper WA1
•https://doi.org/10.1364/SXRAY.1992.WA1

Soft-X-ray Projection Lithography Experiments using Schwarzschild Imaging Optics

D. A. Tichenor, G. D. Kubiak, M. E. Malinowski, R. H. Stulen, S. J. Haney, K. W. Berger, L. A. Brown, W. C. Sweatt, J. E. Bjorkholm, R. R. Freeman, M. D. Himel, A. A. MacDowell, D. M. Tennant, O. R. Wood, J. Bokor, T. E. Jewell, W. M. Mansfield, W. K. Waskiewicz, D. L. White, and D. L. Windt

Soft X-Ray Projection Lithography 1992

Monterey, California United States
6–8 April 1992
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Imaging Experiments (WA)

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D. A. Tichenor, G. D. Kubiak, M. E. Malinowski, R. H. Stulen, S. J. Haney, K. W. Berger, L. A. Brown, W. C. Sweatt, J. E. Bjorkholm, R. R. Freeman, M. D. Himel, A. A. MacDowell, D. M. Tennant, O. R. Wood, J. Bokor, T. E. Jewell, W. M. Mansfield, W. K. Waskiewicz, D. L. White, and D. L. Windt, "Soft-X-ray Projection Lithography Experiments using Schwarzschild Imaging Optics," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1992), paper WA1.

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Abstract

Projection imaging experiments are described. A Schwarzschild objective is illuminated with 14-nm radiation using an ellipsoidal condenser and a laser plasma source.

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