Abstract
Using a recently extended version of the two-dimensional aerial image simulator, SPLAT 1 , we show that annular illumination of a soft-x-ray 1:1 ring-field camera at 13 nm increases image contrast for features with spatial frequencies immediately above the coherent cutoff and that surface figure errors are responsible for the asymmetric, spatially-shifted images that have been observed experimentally.
© 1993 Optical Society of America
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