Design and fabrication of Ge-on-Si slot waveguide for mid- infrared optical gas sensor

Jinha Lim; Joonsup Shim; SangHyeon Kim

doi:10.1364/SENSORS.2021.SF2D.2

OSA Optical Sensors and Sensing Congress 2021 (AIS, FTS, HISE, SENSORS, ES)
OSA Technical Digest (Optica Publishing Group, 2021),
paper SF2D.2
•https://doi.org/10.1364/SENSORS.2021.SF2D.2

Design and fabrication of Ge-on-Si slot waveguide for mid- infrared optical gas sensor

Jinha Lim, Joonsup Shim, and SangHyeon Kim

Optical Sensors 2021

Washington, DC United States
19–23 July 2021
ISBN: 978-1-943580-90-3

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Waveguide and Photonic Chemical Sensors (SF2D)

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J. Lim, J. Shim, and S. Kim, "Design and fabrication of Ge-on-Si slot waveguide for mid- infrared optical gas sensor," in OSA Optical Sensors and Sensing Congress 2021 (AIS, FTS, HISE, SENSORS, ES), S. Buckley, F. Vanier, S. Shi, K. Walker, I. Coddington, S. Paine, K. Lok Chan, W. Moses, S. Qian, P. Pellegrino, F. Vollmer, G. , J. Jágerská, R. Menzies, L. Emmenegger, and J. Westberg, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper SF2D.2.

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Abstract

Optical slot waveguide was demonstrated in the mid-infrared at 4.2 μm for gas sensing application on Germanium-on-silicon platform. 0.47 ppm of limit-of-detection for carbon dioxide can be achieved with enhanced confinement factor and propagation loss.

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