Imaging and Analysis of Semiconductor Surfaces with a Blue-Green Laser Scanning System

Bruce Worster

doi:10.1364/CBGL.1993.CTuA.3

Compact Blue-Green Lasers
Technical Digest Series (Optica Publishing Group, 1993),
paper CTuA.3
•https://doi.org/10.1364/CBGL.1993.CTuA.3

Imaging and Analysis of Semiconductor Surfaces with a Blue-Green Laser Scanning System

Bruce Worster

Compact Blue-Green Lasers 1993

New Orleans United States
2–4 February 1993
ISBN:

From the session
Applications of Compact Blue-Green Lasers 1 (CTuA)

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B. Worster, "Imaging and Analysis of Semiconductor Surfaces with a Blue-Green Laser Scanning System," in Compact Blue-Green Lasers, Technical Digest Series (Optica Publishing Group, 1993), paper CTuA.3.

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Abstract

A system to provide 3-D images of submicron surface structure, composition, and defects on semiconductor wafer surfaces using a multiwavelength blue-green laser is described.

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