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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CTuI2

High power amplification of solid-state Nd:YAG laser with short pulses of 300ps/5kHz

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A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81W with excellent beam quality is available for injection pulse duration of 300ps.

© 2005 Optical Society of America

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