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Single-defect Photonic Crystal Cavity Laser Fabricated by a Combined Lithography of Laser Holography and Focused Ion Beam

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Abstract

InP-based square-lattice photonic crystal laser with a single air-hole defect was fabricated by a combined lithography of laser holography and focused ion beam, which enables the large scale and high throughput fabrication of PC-based devices.

© 2010 Optical Society of America

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