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ZnSe and related alloys have much attention for the application of short-wave-length semiconductor lasers emitting green to blue light.1 Recently, room temperature cw operation of ZnSe-based semi-conductor lasers has been reported.2,3 The vertical cavity surface emitting laser (VCSEL) operating at green to blue spectral region is recognized as an important device for high-density optical recording and so on. However, many problems must be solved to realize green-to-blue VCSELs. One of such problems is the fabrication of high reflective mirrors in short wavelength range. In this paper, we report the fabrication of SiO2/TiO2 dielectric multilayer mirror for ZnSe-based VCSEL by electron beam (EB) evaporation and the characteristic of a vertical Fabry-Perot cavity under the pulsed condition.
© 1995 IEEE
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