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Conferences > CLEOPR > 1995 > ThI > ThI4
  • The Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper ThI4

Optimized proton implantation for planar vertical-cavity surface-emitting lasers

J. Sebastian, P. Ressel, H. Strusny, S. Gramlich, R. Hey, A. Paraskevopoulos, K. Vogel, and R. Gründler

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Abstract

Proton implantation is a key step in the technology of planar Vertical-Cavity Surface-Emitting Lasers (VCSELs). During implantation an isolating layer is created to provide current confinement, thereby minimising laser threshold current. The location of the isolating layer depends on implantation energy and dose, which have to be chosen properly.

© 1995 IEEE

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