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Conferences > CLEOPR > 1995 > ThN > ThN2
  • The Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper ThN2

Carbon film formation by Nd:YAG laser ablation

Fumio Kokai, Yoshinori Koga, Hiroyuki Niino, and Akira Yabe

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Abstract

Thin films of diamond-like carbon1 and carbon nitride2 can be grown by laser ablation of graphite. The properties of these thin films are strongly dependent on the kinetic energy of the atomic and molecular carbon species striking the surface of the growing film. We have investigated the mechanism of carbon film formation by Nd:YAG laser ablation by means of time-of-flight (TOF) mass spectrometry, deposition rate measurement, and Raman spectroscopy.

© 1995 IEEE

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