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  • The Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper ThN1

Pulsed UV-laser processings for new materials

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Abstract

Pulsed laser applications have been practiced for many years with carbon dioxide laser in materials processing such as hole drilling, welding, cutting and surface treatment by its thermal effect. However, with the advent of pulsed UV-laser which includes excimer lasers, Nd:YAG lasers in its 3rd and 4th harmonic modes, the applications becomes more precise, and fine tuned, as has been well demonstrated by clean wall-profile of ablated holes by an excimer laser in comparison with those made by carbon dioxide IR-laser. We like to report here three topics which have been studied in our laboratory.

© 1995 IEEE

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