Abstract

We demonstrate membrane III-V/Si integrated devices. An InGaAsP/Si metal-oxide-semiconductor capacitor Mach-Zehnder modulator shows small Vπ L (0.09 Vcm), and a laser diode coupled to a 0.2- μm-thick Si waveguide shows a fiber coupled power of 4.6 mW.

© 2018 The Author(s)

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